The process had a 1.5 m minimum feature size and two levels of aluminium interconnect.

Using texture reduces reflection for wavelengths comparable with the feature size as well.

By using more than two levels, more information can be put into the minimum feature size.

Various approximations exist when specific assumptions are made about minimum feature size.

If its feature size is between 0.1 um and 100s of microns.

Therefore new, revolutionary concepts are explored to reduce the feature size further.

Despite its popularity, it has issues when feature sizes are scaled down to 30nm and below.

Higher viscosities offer greater control over feature size and are desirable.

There was not a significant difference in orientation with respect to the feature sizes used.

That is likely well beyond the error budget allowed in current processes, let alone one that has a feature size of just 6nm.